Beyond equilibrium thermodynamics in the low temperature plasma processor
نویسندگان
چکیده
منابع مشابه
Thermodynamics "beyond" local equilibrium.
Nonequilibrium thermodynamics has shown its applicability in a wide variety of different situations pertaining to fields such as physics, chemistry, biology, and engineering. As successful as it is, however, its current formulation considers only systems close to equilibrium, those satisfying the so-called local equilibrium hypothesis. Here we show that diffusion processes that occur far away f...
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ژورنال
عنوان ژورنال: Journal of Vacuum Science & Technology B
سال: 2018
ISSN: 2166-2746,2166-2754
DOI: 10.1116/1.5022470